Product For Semiconductor Manufacturing Equipment

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About Products For Semiconductor Manufacturing Equipment

Utilizing static electricity which ceramics feature has, it is also used in semiconductor manufacturing equipment.

Main Products

Vacuum chucks

  • Wafer inspection equipment

Application

Chucking parts for silicon wafers, liquid crystal panels, etc.

Material

DLC-coating on alumina surface (KP-95, KP-990) can be available.

Features

Vacuum chucks can support a surface smooth finish to the nano-level according to machining systems. Overall mapping data can also be measured. Vacuum chucks of up to 18 inches are available.

*This is one of our group companies, NTK CERATEC CO., LTD's product line.

NTK CERATEC

Electro-static chucks

  • Etching Equipment CVD Equipment Ion Implantation Equipment

Application

Electro-static chucks are used for ETCH, CVD, and ion implantation systems.

Material

Alumina, etc.

Features

Electro-static chucks are made of bulk ceramics and have high resistance to plasma and process gas. The built-in heater ensures high in-plane temperature uniformity and contributes to the semiconductor manufacturing processes that are required to support further miniaturization of semiconductors.

Ceramic hands

  • Wafer inspection equipment

Application

Ceramic hands are used for end effectors for silicon wafer conveyance.

Material

As one of the materials for ceramic hands, alumina KP-990 is characterized by excellent wear resistance, and high rigidity is used.

Features

Ceramic hands come in sizes of up to 18 inches. They can also be provided with a vacuum chuck or electro-static chuck function. Ceramic hands with an electro-static chuck function can be used for conveyance in a vacuum.

Jigs

  • Etching Equipment

Application

These jigs are for temperature measurement in processes of circuit formation on silicon wafers.

Material

A high-purity alumina, which is highly resistant to corrosion and produces less impurities, is used.

Features

Formed by mold pressing or hydrostatic pressing, machining technology at pre-baking processing and grinding technology at post-baking process, making it possible to manufacture jigs of various shapes and high accuracy. Because of their outstanding heat resistance, wear resistance, and chemical resistance, jigs are used for semiconductor processing equipment.