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Product For Semiconductor Manufacturing Equipment
Vacuum chuck plate
Application
Chucking parts, such as silicon wafers, liquid crystal panels, etc.
Material
Alumina (KP-95, KP-990, KP-999, etc.)
Features
The finish processing of the asperity of the surface can be ordered by the unit of micrometer, according to the processing equipment to be used.
Products with a size of up to 12 inches can be manufactured.
Static chuck plate
Application
Chucking parts, such as silicon wafers, liquid crystal panels, etc.
Material
Alumina (KP-92, etc.)
Features
The surface finish processing, internal structure, and gas flow can be designed, according to the processing equipment to be used.
Products with a size of up to 12 inches can be manufactured.
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